FIB-SEMforFIB-centricnanofabrication
VELIONisanovelFIB-SEMinstrumentconceptfornanoscalescienceandengineering.FIBnanofabricationisestablishedasastandardtechniqueforfabricatingthree-dimensionalandhigh-resolutionnanostructuressuchasplasmonicdevices,nano-fluidics,localizedimplantation,andfunctionalization.VELIONmeetsthedemandingrequirementsofnanofabrication.Theconceptcomprisesaconfigurableplatformwithfeaturesincluding
• DedicatednanoFIBioncolumn
• Liquidmetalalloysourceformulti-speciesionbeamtechnology
• LaserInterferometerStage
• TailoredFE-SEMcolumn
• Variousoptions/systemconfigurationsincludinggasinjectionandnanomanipulators
VELIONfeaturesaverticallymountedFIB-columnandside-mountedSEM.IncombinationwithRaith’sLaserInterferometerStageandmaturelithographytechnology,VELIONrepresentsauniqueFIB-SEMnanofabricationset-up.ThededicatedFIB-centricsystemarchitectureensuresunrivaledstability,accuracy,andautomation.Eventhemostcomplexstructuresinboth2Dand3Dcanbefabricatedcompletelyunattendedtothehighestprecisionstandardsoverextensiveareasandlongperiods.
Moreover,IONselecttechnologyoffersarangeofionspeciestochoosefrom.Thisfeaturewillpavethewayfornewbreakthroughsinnext-generationresearch.AdaptionofionpropertiestospecificapplicationenhancesFIBprocessing.FindoutmoreaboutthenanoFIBcolumnhere.
