美国赛伦科技为AST在中国地区的授权总销售服务商，赛伦科技在上海，北京分别设有办事处。

美国AST(AngstromSunTechnologiesInc)是世界主要针对科研单位提供：spectroscopicellipsometer(SE),spectroscopicreflectometer(SR)andMicrospectrophotometer(MSP)的知名供应商。客户遍布全球主要科研大学及主要半导体厂商：

NIST

ISMI

NASA

JPL

MarshallSpaceCenter

AirForce

MIT

ColumbiaUniversity

UCBerkeley

GeorgiaTech

UniversityofVirginia

USTC,China

...

BellLaboratories

LockheedMartin

Corning

AppliedMaterials

FirstSolar

DowChemical

Samsung

TexasInstruments

NationalSemiconductor

...

美国赛伦科技上海办事处
吴惟雨/CavenWu Cell:
QQ：
上海市黄浦区陆家浜路1378号万事利大厦

产品总述: Functions Spectroscopic
Reflectometer(SR)Microspectrophotometer(MSP) Spectroscopic
Ellipsometer(SE) WavelengthRange 190to1700(or2300)nm 190to1700(or2300)nm 190nmto30µm MeasurableParameters FilmThickness 20Åto250µm 20Åto50µm 10Åto10µm OpticalConstants N&K N&K N&K R/T/A Yes Yes Geometry Yes DigitalImaging Yes MainFeatures LowCost,FastMeasurement,WideDynamicRange Downto5umSpotSizeonanyPatternedStructure ComplicatedLayerStack Options WavelengthExtension,MappingStage,Heating/CoolingStage UniqueOptions LargeSpotSetupforIn-LineMetrologyApplications Raman&FluorescenceAdd-onSet-upsandoptionalsmallerspotsize

简介:
Spectroscopicellipsometry(SE)isapowerfultechniquetopreciselymeasurethinfilmthickness,determineopticalconstants,investigatesurfaceandinterfacephenomenonandmanyotherphysical,chemicalandopticalpropertiesofmaterials.AngstromSunTechnologiesIncdesignsandmanufactureshighqualityspectroscopicellipsometersystemswithvariousoptionsfordifferentapplications.Besidesellipsometersystemitself,theadvancedanalysissoftwareisessentialtoextractthedesiredinformationasabove-mentioned,suchasthickness,roughness,alloyconcentrationanddielectricconstants.TFProbe™3.0fromusofferspowerfulanalysisfunctionsforellipsometrysensitivitystudy,photometry/ellipsometrysimulationanddataregression.UniquebutconfigurablemodeallowsdifferentuserstoaccessdifferentlevelandsuitableforbothR&Dandproductionqualitycontrolpurpose.

Modelsarespecifiedbasedonwavelengthrangesfordifferentapplications.Thefollowinggraphshowsavailablemodelsfor standardconfigurations.Inaddition,Model500 simplycoversarangeofbothModel100and400.Customizedproducts areavailablewithwavelengthrangeextensionfurtherdowntoDUVorInfrared(IR)ranges.Normally:
   Model100coversawavelengthrangefromDUVtoNIRrangeupto1100nm.
   Model200coversDUVandVisiblerange.
   Model300coversVisiblerange,startingfrom370nmto850nm
   Model400coversNIRrangestartingfrom900nmtypically
   Model450coversVistoNIRrange,startingfrom370nmupto1700nmtypically
   Model500coversDUVtoNIRrange,upto2500nm
   Model600coversNIRtoIRrange(1.7umto17umor1.7umto30um)

Wavelengthrangecoveragedependsonseveralfactorssuchaslightsource,detectors,opticsusedinsystem,lightdeliverymethod(usingfibersornot).Becauseofthesefactors,alltoolscanbecustomizedbasedonspecificapplication.Forexample,NIRrangecanbecoveredupto1700nmor2200nmor2500nmetc.DUVrangecanbedownto190nm.
一。SE椭偏仪主要型号

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ModelSE300BM,400-1100nm,nomapping,

ModelSE200BM,250-1100nm,nomapping

ModelSE450BM,400-1700nm,nomapping

ModelSE500BM,190-1700nm,nomapping

6"stagemapping,adds$20K.

8"stagemapping,adds$22K.

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设备型号说明:
ExampleModel:SE200BA-M300
SE:SpectroscopicEllipsometer
200:Indicates
B:DetectingType
              A:Scanningmonochromatorwithsingleelementdetector
              B:ArrayTypedetectorwithspectrographorinterferometer
A:VariableIncidentAngleType
              A:AutomaticvariableanglewithprecisionGoniometerandcomputercontrolled
              M:Manuallyadjustableincidentangleat5degreeinterval
M:MappingStage
300:MaximummappingsamplesizeOptions:

WavelengthExtensiontoVUVorIRRange

StageSize

ProbingbeamSpotsize

Photometry

Heating/CoolingStage

MappingstageinX-YorRho-Theta

Applications:
· Semiconductorfabrication(PR,Oxide,Nitride..)
· Liquidcrystaldisplay(ITO,PR,Cellgap…..)
· Biologicalfilmsandmaterials
· Opticalcoatings,TiO₂,SiO₂,Ta₂O₅…..
· Semiconductorcompounds
· FunctionalfilmsinMEMS/MOEMS
· Amorphous,nanoandcrystallineSi
· SolarCellIndustry
· MedicaldevicefabricationBackgroundonEllipsometry:
Therearemanytechniquesforcharacterizingmaterials,eachhavingitsownadvantagesanddisadvantagesandeachbeinguniquelyabletorevealmaterialpropertiesthatothertechniquescan'taccess.Spectroscopicellipsometry(SE)isanopticaltechniquethatisparticularlyflexibleinthatitcanbeusedtodeterminetheopticalandphysicalpropertiesofawidevarietyofthin-filmmaterials.ItsabilitytodothiswithoutcontactordamagetothematerialofinteresthasseenitbecomeroutinelyusedinR&Dlaboratoriesandwithinmanufacturingfacilitiesformonitoringthinfilmgrowthanddepositionprocesses.
SEreliesonthedeterminationofthepolarizationstateofabeamofpolarizedlightreflectedfromthesampleundercharacterization.WhenperformingSEmeasurements,thepolarizationstateisdeterminedatmanydiscretewavelengthsoverabroadwavelengthrange.Thechangeinthepolarizationstatecanbetracedtothephysicalpropertiesofthethinfilmbymeansofamodel.Characteristicssuchaslayerthickness,surfaceroughness,refractiveindex(n)andextinctioncoefficient(k)ofthematerialscanbedeterminedwithexcellentprecisionthroughregressionanalysis.
TheinstrumentdeterminestwoellipsometryanglesΨandΔ,whichdescribethechangeinthepolarizationstateofthebeamuponreflectionfromthesample.Theratiooftheamplitudeofthepolarizationwithintheplaneofincidence(P)totheamplitudeofthepolarizationperpendiculartotheplaneofincidence(S)isrepresentedbyΨ.ThephaseretardationbetweenthetwopolarizationvectorsPandSisrepresentedbyΔ.ChangesinΔandΨessentiallydependupontheopticalconstants,nandk,ofthelayermaterialsandsubstrate,physicalthicknessoftheindividuallayersandsurfaceroughness.Aregressionanalysisallowsthedeterminationoftheseparameters.
SEdataforΔandΨareobtainedatanumberofincidentanglesinaplanenormaltothesamplesurfaceandtypicallyat100-200differentwavelengthsforeachangle.SEinstrumentsuseawhitelightsourceandindividualwavelengthsareselectedfordetectionbyeitheramotordrivenmonochromator,oramulti-channeldetectorthatcandetectmanywavelengthssimultaneously.Increasingthenumberofanglesandwavelengthsatwhichdataareacquiredimprovesanalysisprecision,especiallyforcomplicatedepitaxialstructures. Note:
1.SystemconfigurationandSpecificationssubjecttochangewithoutnotice
2.*Filmproperty,surfacequalityandlayerstackdependent
3.Customizedsystemavailableforspecialapplications
4.TFProbeisregisteredtrademarkofAngstromSunTechnologiesInc.

二.Microspectrophotometer(微光斑薄膜测试仪)

MSP100MicrospectrophotometerandFilmThicknessMeasurementSystem

Features

SystemConfigurations

Specifications

Options

Applications

ApplicationExamples

Features:· EasytooperatewithWindowbasedsoftware
· AdvancedDUVopticsandruggeddesignforhighestuptimeandthebestsystemperformance
· Arraybaseddetectorsystemtoensurefastmeasurement
· Affordable,portableandsmallfootprinttabletopdesign
· MeasurefilmthicknessandRefractiveIndexupto5layersovermicronsizeregion
· Allowtoacquirereflection,transmissionandabsorptionspectrainmilliseconds
· Capabletobeusedforrealtimespectra,thickness,refractiveindexmonitoring
· Systemcomeswithcomprehensiveopticalconstantsdatabaseandlibrary
· AdvancedSoftwareallowsusertouseeitherNKtable,dispersionorcompositemodel(EMA)foreachindividualfilm
· IntegratedVision,spectrum,simulation,filmthicknessmeasurementsystem
· Applytomanydifferenttypeofsubstrateswithdifferentthicknessupto200mmsize
· Deepultravioletlightallowstomeasurefilmthicknessdownto20Å
· 2Dand3Doutputgraphicsanduserfriendlydatamanagementinterface
· AdvancedImagingsoftwarefordimensionmeasurementsuchasangle,distance,area,particlecountingandmore
· VariousoptionsavailabletomeetspecialapplicationsSystemConfiguration:· Model:MSP100RTM
· Detector:CCDArraywith2048 pixels
· LightSource:HighpowerDUV-Visible
· AutomaticStage:BlackAnodizedAluminumAlloywith5”x3”nettraveldistanceand1µmresolution,programcontrolled
· MotorizedZfocusdriveandX-Y-Zjoystick
· LongWorkingDistanceObjectives:4x,10x,15x(DUV),50x
· Communication:USB
· MeasurementType:Reflection/Transmissionspectra,Filmthickness/refractiveindexandfeaturedimensions
· Computer: IntelCore2DuoProcessorwith200GBHarddriveandDVD+RWBurnerplus19”LCDMonitor
· Power:110–240VAC/50-60Hz,3A
· Dimension:16’x16’x18’(Tabletopsetup)
· Weight:120lbstotal
· Warranty:OneyearlaborandpartsSpecifications:                         · Wavelengthrange:250to1000nm
· WavelengthResolution:1nm
· SpotSize:100µm(4x),40µm(10x),30µm(15x),8µm(50x)
· SubstrateSize:upto20mmthick
· Measurablethicknessrange^*:20Åto25µm
· MeasurementTime:2msminimum
· Accuracy^*:betterthan0.5%(comparingwithellipsometryresultsforThermalOxidesamplebyusingthesameopticalconstants)
· Repeatability^*:<2Ǻ(1sigmafrom50thicknessreadingsfor1500ǺThermalSiO2onSiWafer)Options:                                                                                                                     Top· WavelengthextensiontotoFurtherDUVorNIRrange
· HigherpowerDUVopticsforsmallerspotsize
· Customizedconfigurationforspecialapplications
· HeatingandCoolingStagefordynamicstudy
· Optionalstagesizeholdingsamplesupto300mm
· Higherwavelengthrangeresolutiondownto0.1nm
· Variousfiltersforspecialapplications
· Add-onaccessoriesforfluorescencemeasurement
· Add-onaccessoriesforRamanapplications
· Add-onaccessoriesforpolarizingapplicationsApplications:                                                                                                             Top· Semiconductorfabrication(PR,Oxide,Nitride..)
· Liquidcrystaldisplay(ITO,PR,Cellgap…..)
· Forensics,Biologicalfilmsandmaterials
· Inks,Mineralogy,Pigments,Toners
· Pharmaceuticals,MedialDevices
· Opticalcoatings,TiO₂,SiO₂,Ta₂O₅…..
· Semiconductorcompounds
· FunctionalfilmsinMEMS/MOEMS
· Amorphous,nanoandcrystallineSiApplicationExamples:                                                                                             Top1.MeasuredTransmissionSpectrafromThreeFilters

2.MeasuredFilmThickness

3.MeasuredReflectionSpectrumoveraMEMSMirror

4.MappedThicknessUniformityover4"wafer
Note:1.SystemconfigurationandSpecificationssubjecttochangewithoutnotice
2.*Filmproperty,surfacequalityandlayerstackdependent
3.Customizedsystemavailableforspecialapplications
4.TFProbeisregisteredtrademarkofAngstromSunTechnologiesInc.

三.SR薄膜反射仪

SRM300FilmThicknessMappingSystem

Features

SystemConfigurations

Specifications

Options

Applications

ApplicationExamples

MoreInformation

Features:

FilmThicknessMeasurement-SRM300FilmThicknessGauge

WhenyouneedanaccuratethinfilmthicknessmeasurementourSRM300allowsyoutomapfilmthicknessandrefractiveindexupto5layersthick.NoneedtoworryaboutcomplicatedequipmentsincetheSRM300iseasytosetupandoperate.ItusesWindowsbasedsoftware,somostpeoplearealreadyfamiliarwiththelookandfeeloftheoperatingsystem.Thisfilmthicknessgaugecanhandlevarioustypesofgeometrysubstrateupto300mmindiameterandvarioustypesofmappingpatternssuchaslinear,polar,squareorevenarbitrarycoordinates.Thearraybaseddetectorsystemensuresthefastestfilmthicknessmeasurement.Withitsadvancedopticsandruggeddesignyoucanalwaysbesuretogetthebestsystemperformance.
· EasytosetupandoperatewithWindowbasedsoftware
· Varioustypesofgeometrysubstrateupto300mmindiameter
· Varioustypesofmappingpatternsuchaslinear,polar,squareorarbitrarycoordinates
· Advancedopticsandruggeddesignforbestsystemperformance
· Arraybaseddetectorsystemtoensurefastmeasurement
· MapfilmthicknessandRefractiveIndexupto5layers
· Systemcomeswithcomprehensiveopticalconstantsdatabaseandlibrary
· Includecommonlyusedrecipes
· AdvancedTFProbeSoftwareallowsusertouseeitherNKtable,dispersionoreffectivemediaapproximation(EMA)foreachindividualfilm.
· UpgradeabletoMSP(Microspectrophotometer)mappingsystemwithpatternrecognition,orLargeSpotformappingoverpatternedorfeaturedstructure(withZonerageModel)
· Applytomanydifferenttypeofsubstrateswithdifferentthickness
· 2Dand3DoutputgraphicsanduserfriendlydatamanagementinterfacewithstatisticalresultsSystemConfiguration:· Model:SRM300-300
· Detector:CCDArraywith2048 pixels
· LightSource:DCregulatedTungsten-Halogen
· LightDelivery:Optics
· Stage¹:BlackAnodizedAluminumAlloyVacuumchuckholds200mmwafer
· Communication:USB&RS232
· Software:TFProbe2.2M
· MeasurementType:Filmthickness,reflectionspectrum,refractiveindex
· Computer:IntelCore2DuoProcessorwith200GBHarddriveandDVD+RWBurnerplus19”LCDMonitor
· Power:110–240VAC/50-60Hz,3A
· Dimension:14”(W)x20”(D)x14”(H)
· Weight:100lbs
· Warranty:OneyearlaborandpartsSpecifications:

Wavelengthrange:400to1050nm

SpotSize:500µmto5mm

SampleSize:300mmindiameter

SubstrateSize:upto50mmthick

NumberofLayers^*:Upto5films

Measurablethicknessrange^*:50nmto50µm

MeasurementTime:2ms-1s/sitetypical

PositionalRepeatability:~1µm

Accuracy^*:betterthan0.5%(comparingwithellipsometryresultsforThermalOxidesamplebyusingthesameopticalconstants)

Repeatability^*:<2Ǻ(1sigmafrom50thicknessreadings atcenterfor1500ǺThermalSiO2onSiWafer)

Options: Top

AdditionalModelswithWavelengthExtensiontoDUVorNIRRange:SRM100:250nm-1000nm

SRM400:900nm-1700nm
SRM500:400nm-1700nm

OtherSampleSize:200mmwafer(SRM300-200)

Customizedsize:Available

LargeSpotAccessoriesforfeaturedstructuremeasurement

Smallspotaccessoriesforhighlynonuniformsamples

Applications:

价格	面议
发货	广东东莞市预售，付款后7天内
品牌	AngstromSun
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美国AST椭偏仪

FilmThicknessMeasurement-SRM300FilmThicknessGauge

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