美国OAI光功率计（ExposureAnalyzer）
MODEL358
ThisinstrumentisdesignedforusewiththeASMHighIntensity,Canon,Nikon,andUltratechHighIntensityWaferSteppers.ThemicroprocessorbasedModel358ExposureAnalyzerperformsmeasurement,storageandrecallofnineseriesofreadings.Readsintensity,energy,andtime(1600mW/cm2,4000mJ/cm2,2.5secondsmaximum).For365,400,420,and436nmwavelengths.Otherwavelengthsareavailable
APPLICATION
PerfectforawidevarietyofindustrieswheretheprecisionmeasurementofUVenergyisessential,theModel358isdesignedforanyapplicationrequiringrepeatable,reliableUVmeasurement.
FEATURES
•DigitalDisplayprovidesclearmeasurementstraceabletoNIST
•MeasuresIntensity,Time,andEnergy
•Records%deviationoveraseriesofexposures
•Probewavelengthdisplayhelpspreventerrorsinsetup
•Simplepushbuttonoperationprovidesreliableresults
•RS232outputenablesdownload/recordofanalyzermeasurementresults
•Detachableprobestomatchthespectralresponseofmanyphotoresists
•Displayreadingscanbefrozen
•Frontpanelremindersprompttheuser
•Ruggedaluminumcasefeatureshandleandprobepouchforportability
