VELION--FIB-SEM系统

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FIB-SEMforFIB-centricnanofabrication

VELIONisanovelFIB-SEMinstrumentconceptfornanoscalescienceandengineering.FIBnanofabricationisestablishedasastandardtechniqueforfabricatingthree-dimensionalandhigh-resolutionnanostructuressuchasplasmonicdevices,nano-fluidics,localizedimplantation,andfunctionalization.VELIONmeetsthedemandingrequirementsofnanofabrication.Theconceptcomprisesaconfigurableplatformwithfeaturesincluding

• DedicatednanoFIBioncolumn

• Liquidmetalalloysourceformulti-speciesionbeamtechnology

• LaserInterferometerStage

• TailoredFE-SEMcolumn

• Variousoptions/systemconfigurationsincludinggasinjectionandnanomanipulators

VELIONfeaturesaverticallymountedFIB-columnandside-mountedSEM.IncombinationwithRaith’sLaserInterferometerStageandmaturelithographytechnology,VELIONrepresentsauniqueFIB-SEMnanofabricationset-up.ThededicatedFIB-centricsystemarchitectureensuresunrivaledstability,accuracy,andautomation.Eventhemostcomplexstructuresinboth2Dand3Dcanbefabricatedcompletelyunattendedtothehighestprecisionstandardsoverextensiveareasandlongperiods.

Moreover,IONselecttechnologyoffersarangeofionspeciestochoosefrom.Thisfeaturewillpavethewayfornewbreakthroughsinnext-generationresearch.AdaptionofionpropertiestospecificapplicationenhancesFIBprocessing.FindoutmoreaboutthenanoFIBcolumnhere.