美国Gaertner椭偏仪/膜厚测量仪/Ellipsometer_光学仪器_仪器设备_供应

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基本参数

品牌：	Gaertner
所在地：	广东东莞市
起订：	≥1 PCS
供货总量：	未填
有效期至：	长期有效

详细说明

GaertnerLSE-2A2W进口椭偏仪

LSE-2A2WEllipsometerspecifications

Alignment:

Tiltandtableheightusingcomputeralignmentscreen.

IncidenceAngles:

fixedat 60°for544nmlaserand70° for633nm laser

MethodofMeasurement:

AdvancedStokesMeterdeterminesthecompletemeasuringbeam polarizationusingnomovingpartsandnomodulators,only4stationary silicondetectorssomeasurementsarestableandexact.

MeasurementTime:

Particallyinstantanious

MeasuringLaser:

544&633nmHeNeGasLaserswith1mmmeasuringbeamdiameter

AlignmentLaser:

670nmLaserDiode

Sample(Wafer)Size:

300 mmwideXunlimitedlength

Stage:

Handpositioningwithtiltandtableheightadjustment.

Software:

WindowsLGEMP4 layerabsorbingincluded.

RequiredComputer:

(notincluded)Windows PCorlaptopwithUSBport

FilmThicknessRange:

0-60,000Angstromsonsubstrateoron1,2,3,or4known sublayers.

Precision,Repeatability:

Sub-Angstromovermostofthemeasurementrange.

RefractiveIndex:

±.001overmostofthemeasurementrange.

Power:

SuppliedbycomputerUSBbusandlaserpowersupplies.

Dimensions:

Height: 16.5 Width:27.5 Depth:16 inches
NetWeight:45lbs. ShippingWeight:65lbs.

CDRHCompliance:

AlllaserellipsometerssuppliedbyGaertnercomplywithCDRH requirements21CFR1040foraClassIIlaserproductemittinglessthan1mW orClassIIIblessthan5mWoflowpowerradiation.Aswithanybright sourcesuchasthesunorarclamp,theoperatorshouldnotstaredirectly intothelaserbeamorintoitsreflectionfromhighlyreflectingsurfaces.

CECompliance:

ComplywithEuropeansafetydirectivesandcarrytheCEmark.

ModelLSEEllipsometer

ManufacturedbyGaertnerScientific,USA

StokesEllipsometerLSEDescription
TheStokesEllipsometerLSEisacontinuationofanentirelynewlineofellipsometersbasedontheadvancedStokesMetertechnology-winnerofPhotonicsSpectraandR&D100bestnewproductsawards.
TheLSEmodelellipsometerincludesdataacquisitionandanalysissoftware. Anoptional WindowsbasedcomputerwithPCIinterfaceisavailable.
This ellipsometerusespatentedStokesMetertechnologywithnomovingpartsandnomodulatorstoquicklyandaccuratelydeterminethecompletepolarizationstateofthe6328Ålasermeasuringbeamata70°incidenceangle.Thespace-savingdesignfeaturesasmallfootprintyetitcanaccommodatelargesamplesupto300mmwide.Thesamplestagecanbeeasilymovedbyhandtomeasureanypointonthesamplesurface.Thesampletableincludesamanualtiltandtableheightadjustmentwhichissetusinganalignmentscreenonthecomputer.
Thedataacquisitionandanalysissoftware,LGEMP,canmeasurethetoplayerfilmthicknessandfilmrefractiveindexonasubstrateoron1,2,or3knownbottomlayers.Thefilmscanbetransparentorabsorbing.Thisdurableintegrationofhardwareandsoftwareisfastandeasytouse.
Extremelyprecise,stableandlowcostthemodelLSEStokesEllipsometerrepresentsanexcellentvalueinabasicellipsometer.
DescriptionofStokesmeterTechnology
Thispatenteddeviceusesnomovingpartsandnomodulatorstoquicklyandaccuratelydeterminethecompletepolarizationstateofthemeasuringbeam.

ThediagramaboveshowstheStokesMeterphotopolarimeterforthesimultaneousmeasurementofallfourStokesparametersoflight.Thelightbeam,thestateofpolarizationofwhichistobedetermined,strikes,atobliqueanglesofincidence,threephotodetectorsurfacesinsuccession,eachofwhichispartiallyspectrallyreflectingandeachofwhichgeneratesanelectricalsignalproportionaltothefractionoftheradiationitabsorbs.Afourthphotodetectorissubstantiallytotallylightabsorptiveanddetectstheremainderofthelight.Thefouroutputsthusdevelopedforma4x1signalvectorIwhichislinearlyrelated,I=AS,totheinputStokesvectorS.Consequently,SisobtainedbyS=A(-1)I.The4x4instrumentmatrixAmustbenonsingular,whichrequiresthattheplanesofincidenceforthefirstthreedetectorsurfacesarealldifferent.Foragivenarrangementoffourdetectors,Acaneitherbecomputedordeterminedbycalibration.
TechnologicalAdvantage
Theclean,compactStokesMeterreplacesatypicalrotatinganalyzerassemblyconsistingofadrum,prism,encoders,switches,motoranddetectorandtheirassociatedelectronics.Inaddition,thewaveplatemechanismonthepolarizerarm,iseliminated.Thisresultsinafast,precise,stablenomovingpartsellipsometer.
AnoutstandingfeatureistheStokesEllipsometer'scompensationforsmallchangesinangularbeamdeviationcausedbysampleout-of-flatness.Thispermitsfast,uninterruptedmeasurementovertheentirewafersurfacewithouttheneedtopausetocorrectforfocusandtilt.Whenscanningsimilarsamples,tilt-free,focus-freeoperationistheobviousbenefit.

LSEEllipsometerspecifications

Alignment: Tiltandtableheightoncomputeralignmentscreen.IncidenceAngle: 70°MethodofMeasurement: PatentedStokesMeterdeterminesthecompletebeampolarizationusingnomovingpartsandnomodulators,only4stationarysilicondetectorssomeasurementsareexactandstable.MeasurementTime: Practicallyinstantaneous.LightSource: 6328ÅHeNeLaserBeamDiameter: 1mmSample(Wafer)Size: 300mmwideXunlimitedlengthStages: Handpositioningwithtiltandtableheightadjustment.Software: Windows2000/XPLGEMP4layerabsorbing.Computer: Windows2000/XPPCwithavailablePCIslot(option) FilmThicknessRange: 0-60,000Angstromsonsubstrateoron1,2,3,or4knownsub-layers.Precision&Repeatability: Sub-Angstromovermostofthemeasurementrange.RefractiveIndex: ±.001overmostofthemeasurementrange.Power: Suppliedbycomputerinterfacecard andlaserpowersupply.Dimensions: Height: 16.5 Width:27.5 Depth:16inches
NetWeight:40lbs. ShippingWeight:65lbs.CDRHCompliance: AlllaserellipsometerssuppliedbyGaertnercomplywithCDRHrequirements21CFR1040foraClassIIlaserproductemittinglessthan1milliwattoflowpowerradiation.Aswithanybrightsourcesuchasthesunorarclamp,theoperatorshouldnotstaredirectlyintothelaserbeamorintoitsreflectionfromhighlyreflectingsurfaces.CECompliance: SseriesEllipsometerscomplywithEuropeansafetydirectivesandcarrytheCEmark.

中国销售服务商
美国赛伦科技上海办事处
吴惟雨

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