汞探针

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汞探针(Hg Probe)及载流子浓度分布测量仪(Miller Profiler) 

1) 汞探针 Hg Probe
- 2017为导电衬底片用
汞芯大小：0.64mm(0.025”)；1.27mm(0.05”)；1.91mm(0.075”)；2.29mm(0.09”)；
- 2017B为半绝缘衬底片用
汞芯大小：0.46mm(0.018”)；0.64mm(0.025”)；

汞探针特点：
• Permanent machined orifice plate  (no mylar replacement)
• Minimal series resistance via innovative Schottky/return dot configuration
• Precision vacuum control
• Unique vacuum Hg-pull/sample hold-down configuration improves repeatability of the mercury Schottky

2) 米勒剖面浓度分析仪 Miller Profiler
- 应用：
• Bulk, epitaxial and ion implanted wafers -
• Epitaxial and implanted GaAs wafers -
• Process control wafers -
• Special sharp peak structures 

- 测量参数 
• Carrier density vs depth data

- 仪器特点
• On-screen real time plot (N vs X) -
• Graphical and columnar data representations -
• Keyboard selectable BIAS and DEPTH modes -
• Menu screen entries for all system parameters -
• Integrated calibration routine -
• Easy-to-use TRAP detection feature

汞探针,2017B

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