ZEP520A 电子束光刻胶

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1. Characteristics

ZEP520A is high performance positive EB resists which show high resolution, high sensitivity and dry etch resistance.

They are suitable for various EB processes.

(1) Resolution

Shows high resolution and rectangle pattern profile.

(2) Resistance to dry etching

Shows high dry etch resistance and they are almost equivalent to that of positive photoresists generally used.

(3) Sensitivity

Shows high sensitivity.

2. Properties

7. Spin Curve

8.Dependence on Prebake Temperature

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